Invention Grant
- Patent Title: Apparatus for VHF impedance match tuning
- Patent Title (中): VHF阻抗匹配调谐装置
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Application No.: US12511377Application Date: 2009-07-29
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Publication No.: US08578879B2Publication Date: 2013-11-12
- Inventor: Kartik Ramaswamy , Hiroji Hanawa , Kenneth S. Collins , Lawrence Wong , Samer Banna , Andrew Nguyen
- Applicant: Kartik Ramaswamy , Hiroji Hanawa , Kenneth S. Collins , Lawrence Wong , Samer Banna , Andrew Nguyen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01P7/04 ; H01P7/06

Abstract:
Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The tuning capacitor may be formed by a first tuning electrode and a second tuning electrode and an intervening dielectric, wherein the first tuning electrode is formed by a portion of the inner conductor. A load capacitor may be provided for variably coupling energy from the inner conductor to a load. The load capacitor may be formed by the inner conductor, an adjustable load electrode, and an intervening dielectric.
Public/Granted literature
- US20110023780A1 APPARATUS FOR VHF IMPEDANCE MATCH TUNING Public/Granted day:2011-02-03
Information query
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