Embodiments of the subject invention relate to a method and apparatus for electromagnetic actuation. Embodiments of an electromagnet actuator in accordance with the subject invention can include a fixed main body and a deformable membrane or displaceable piston-like member. In the case of piston motion, in specific embodiments, the piston can be supported by a corrugated diaphragm or bellows. In various embodiments, all or portions of the electromagnet actuator can be produced using microfabrication techniques. Specific embodiment of the subject invention can incorporate a plurality of magnets providing magnetic flux to a plurality of coil conductor elements so as to provide a plurality of locations that a force is applied to the moveable body portion of the electromagnetic actuator. Specific embodiments can incorporate an array of magnets interdigitated with an array of coil conductor elements, where the arrays can include 2, 5, 10, 20, or more each. Further specific embodiments allow the relative position of the magnetic flux and coil conductor elements to remain substantially the same during the movement of the moveable body by positioning the magnets and coil conductor elements on the moveable body so that the relative position of the magnets and the coil conductor elements on the moveable body do not change with the movement of the moveable body.