发明授权
- 专利标题: Handling device and handling method of quartz glass crucible
- 专利标题(中): 石英玻璃坩埚的处理装置及处理方法
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申请号: US12804479申请日: 2010-07-21
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公开(公告)号: US08585346B2公开(公告)日: 2013-11-19
- 发明人: Manabu Shonai , Taira Sato , Minoru Shirakawa , Hiroshi Takahashi , Shuichi Ikehata
- 申请人: Manabu Shonai , Taira Sato , Minoru Shirakawa , Hiroshi Takahashi , Shuichi Ikehata
- 申请人地址: JP Akita-shi
- 专利权人: Japan Super Quartz Corporation
- 当前专利权人: Japan Super Quartz Corporation
- 当前专利权人地址: JP Akita-shi
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 优先权: JP2009-171351 20090722; JP2010-147502 20100629
- 主分类号: B23Q1/52
- IPC分类号: B23Q1/52 ; B65G47/90
摘要:
An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device. The present invention provides a crucible handling device 1 for handling a quartz glass crucible 5, the device including: a frame 4 having a beam 2 extending in a horizontal direction and a pair of arms 3 protruding from the beam 2 in a direction perpendicular to a central axis line direction of the beam 2 such that at least one of the arms 3 is able to move in the central axis line direction of the beam 2; a pair of sandwiching means 6 assembled with the pair of the arm 3 to face each other, for sandwiching a body 50 of the quartz glass crucible 5 in a radial direction of the crucible; engagement means 7 provided adjacent to each sandwiching means 6 and formed by a pair of tongues 70 movable to approach or be separated from each other in a central axis direction of the crucible, for sandwiching and holding the quartz glass crucible 5 therebetween in the central axis direction of the crucible; and driving means 8 for causing the sandwiching means 6 and the engagement means 7 to reciprocate along the arm 3. The present invention also provides a method of handling a quartz glass crucible using such a device 1 as described above.