Invention Grant
- Patent Title: Micropores and methods of making and using thereof
- Patent Title (中): 微孔及其制造和使用方法
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Application No.: US12812986Application Date: 2009-01-21
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Publication No.: US08585916B2Publication Date: 2013-11-19
- Inventor: Thomas D. Perroud , Kamlesh D. Patel , Robert J. Meagher
- Applicant: Thomas D. Perroud , Kamlesh D. Patel , Robert J. Meagher
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agency: Smith, Gambrell & Russell, LLP
- International Application: PCT/US2009/031516 WO 20090121
- International Announcement: WO2009/126352 WO 20091015
- Main IPC: B31D3/00
- IPC: B31D3/00
Abstract:
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Public/Granted literature
- US20110024368A1 Novel Micropores and Methods of Making and Using Thereof Public/Granted day:2011-02-03
Information query
