发明授权
- 专利标题： Method and apparatus for automatic measurement of pad geometry and inspection thereof
- 专利标题（中）： 用于自动测量垫几何形状和检查方法和装置
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申请号： US11613087申请日： 2006-12-19
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公开(公告)号： US08588511B2公开(公告)日： 2013-11-19
- 发明人: Gang Liu , Aaron S. Wallack , David J. Michael
- 申请人： Gang Liu , Aaron S. Wallack , David J. Michael
- 申请人地址： US MA Natick
- 专利权人： Cognex Corporation
- 当前专利权人： Cognex Corporation
- 当前专利权人地址： US MA Natick
- 代理机构： Loginov & Associates, PLLC
- 主分类号： G06K9/00
- IPC分类号： G06K9/00 ; G06K9/48 ; H04N7/18
摘要：
An image of a semiconductor interconnection pad is analyzed to determine a geometric description of the zone regions of a multiple zone semiconductor interconnection pad. Edge detection machine vision tools are used to extract features in the image. The extracted features are analyzed to derive geometric descriptions of the zone regions of the pad, that are applied in semiconductor device inspection, fabrication, and assembly operations.