发明授权
- 专利标题: Method for manufacture of optically pumped, surface-emitting semiconductor laser device
- 专利标题(中): 光泵浦表面发射半导体激光器件的制造方法
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申请号: US11986909申请日: 2007-11-27
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公开(公告)号: US08592236B2公开(公告)日: 2013-11-26
- 发明人: Tony Albrecht , Norbert Linder , Johann Luft
- 申请人: Tony Albrecht , Norbert Linder , Johann Luft
- 申请人地址: DE Munich
- 专利权人: OSRAM GmbH
- 当前专利权人: OSRAM GmbH
- 当前专利权人地址: DE Munich
- 代理机构: Cozen O'Connor
- 优先权: DE10026734 20000530; DE10108079 20010220
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for manufacturing an optically pumped surface-emitting semiconductor laser device, wherein a surface-emitting semiconductor laser layer sequence having a quantum confinement structure is applied onto a common substrate. The surface-emitting semiconductor laser layer sequence outside an intended laser region is removed and a region is exposed. An edge-emitting semiconductor layer sequence is applied onto the exposed region over the common substrate, wherein the exposed region is exposed via the removing step, and the exposed region is suitable for transmitting pump radiation into the quantum confinement structure. A current injection path is then formed in the edge-emitting semiconductor layer sequence.
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