发明授权
- 专利标题: Optical system of a microlithographic projection exposure apparatus and microlithographic exposure method
- 专利标题(中): 微光刻投影曝光装置的光学系统和微光刻曝光方法
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申请号: US12971798申请日: 2010-12-17
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公开(公告)号: US08593618B2公开(公告)日: 2013-11-26
- 发明人: Michael Totzeck
- 申请人: Michael Totzeck
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G02B5/30 ; G03F7/20
摘要:
The disclosure relates to an optical system of a microlithographic projection exposure apparatus and to a microlithographic exposure method. An optical system of a microlithographic projection exposure apparatus includes an image rotator, which is arranged in the optical system such that light impinging on the image rotator is at least partially polarized. The image rotator rotates, for light impinging on the image rotator, both the intensity distribution and the polarization distribution of through a given angle of rotation.
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