发明授权
- 专利标题: Refractive index measuring apparatus
- 专利标题(中): 折射率测量装置
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申请号: US12990547申请日: 2010-01-21
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公开(公告)号: US08593624B2公开(公告)日: 2013-11-26
- 发明人: Yusuke Kusaka , Yohei Takechi , Atsushi Fukui , Seiji Hamano , Kazumasa Takata
- 申请人: Yusuke Kusaka , Yohei Takechi , Atsushi Fukui , Seiji Hamano , Kazumasa Takata
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2009-011530 20090122
- 国际申请: PCT/JP2010/000311 WO 20100121
- 国际公布: WO2010/084748 WO 20100729
- 主分类号: G01N21/41
- IPC分类号: G01N21/41
摘要:
By using two probe optical systems for measurement by disposing the probe optical systems with a test object sandwiched therebetween, an optical path length of light transmitted through the test object which is identified locally is calculated using an interference signal thereof. In addition, a geometrical thickness of the same part is calculated by measuring positions of the probe optical systems, whereby two calculated values are obtained. Based on the values and a calculated value for a reference object, a refractive index distribution of the test object is obtained.
公开/授权文献
- US20110051127A1 REFRACTIVE INDEX MEASURING APPARATUS 公开/授权日:2011-03-03
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