发明授权
- 专利标题： Method of manufacturing variable wavelength interference filter and variable wavelength interference filter
- 专利标题（中）： 制造可变波长干涉滤波器和可变波长干涉滤波器的方法
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申请号： US13084770申请日： 2011-04-12
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公开(公告)号： US08593723B2公开(公告)日： 2013-11-26
- 发明人: Koji Kitahara , Akira Sano
- 申请人： Koji Kitahara , Akira Sano
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2010-094765 20100416
- 主分类号： H01S3/00
- IPC分类号： H01S3/00 ; H01S4/00
摘要：
A method of manufacturing a variable wavelength interference filter includes forming an electrostatic gap forming groove, a wiring forming groove extending from the electrostatic gap forming groove to an outer peripheral edge of the chip region, and an air communication groove through which the wiring groove forming groove communicates with the outside of the first substrate, in a chip region of a first substrate.
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