- Patent Title: Reduced isotropic etchant material consumption and waste generation
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Application No.: US12871662Application Date: 2010-08-30
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Publication No.: US08597461B2Publication Date: 2013-12-03
- Inventor: Steven T. Mayer , David W. Porter
- Applicant: Steven T. Mayer , David W. Porter
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C23F1/46
- IPC: C23F1/46 ; C23F1/00 ; C23F1/08

Abstract:
Methods and apparatus for isotropically etching a metal from a work piece, while recovering and reconstituting the chemical etchant are described. Various embodiments include apparatus and methods for etching where the recovered and reconstituted etchant is reused in a continuous loop recirculation scheme. Steady state conditions can be achieved where these processes are repeated over and over with occasional bleed and feed to replenish reagents and/or adjust parameters such as pH, ionic strength, salinity and the like.
Public/Granted literature
- US20110056913A1 REDUCED ISOTROPIC ETCHANT MATERIAL CONSUMPTION AND WASTE GENERATION Public/Granted day:2011-03-10
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