Invention Grant
- Patent Title: Laser processing method
- Patent Title (中): 激光加工方法
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Application No.: US13614042Application Date: 2012-09-13
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Publication No.: US08598015B2Publication Date: 2013-12-03
- Inventor: Fumitsugu Fukuyo , Kenshi Fukumitsu
- Applicant: Fumitsugu Fukuyo , Kenshi Fukumitsu
- Applicant Address: JP Hamanatsu-shi, Shizuoka
- Assignee: Hamamatsu Photonics K.K.
- Current Assignee: Hamamatsu Photonics K.K.
- Current Assignee Address: JP Hamanatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JPP2002-067372 20020312
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A laser processing method which can highly accurately cut objects to be processed having various laminate structures is provided. An object to be processed comprising a substrate and a laminate part disposed on the front face of the substrate is irradiated with laser light L while a light-converging point P is positioned at least within the substrate, so as to form a modified region due to multiphoton absorption at least within the substrate, and cause the modified region to form a starting point region for cutting. When the object is cut along the starting point region for cutting, the object 1 can be cut with a high accuracy.
Public/Granted literature
- US20130252402A1 LASER PROCESSING METHOD Public/Granted day:2013-09-26
Information query
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