Invention Grant
US08598524B2 Slider bearing for use with an apparatus comprising a vacuum chamber
有权
用于与包括真空室的设备一起使用的滑块轴承
- Patent Title: Slider bearing for use with an apparatus comprising a vacuum chamber
- Patent Title (中): 用于与包括真空室的设备一起使用的滑块轴承
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Application No.: US12303715Application Date: 2007-04-26
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Publication No.: US08598524B2Publication Date: 2013-12-03
- Inventor: Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
- Applicant: Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Ki O
- International Application: PCT/US2007/010006 WO 20070426
- International Announcement: WO2007/145712 WO 20071221
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
An apparatus for loading a sample into a particle-optical instrument that includes a slider bearing having a base plate in contact with the vacuum chamber at one side, said base plate showing a first through-hole in contact with the vacuum chamber, and a second plate, one side of the second plate in contact with the base plate, said second plate also showing a through-hole, where the faces of the base plate and the second plate facing each other are sufficiently smooth to form a non-elastomeric vacuum seal and where the second plate is a flexible plate and the face of the flexible plate opposite to the base plate is equipped to seal against a cup equipped to hold a sample. Preferably the through-hole in the base plate shows a rim facing the flexible plate with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimize particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, particle generation is minimized.
Public/Granted literature
- US20100276592A1 Compact Scanning Electron Microscope Public/Granted day:2010-11-04
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