发明授权
- 专利标题: Systems and methods for processing a film, and thin films
- 专利标题(中): 用于加工薄膜和薄膜的系统和方法
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申请号: US12095450申请日: 2006-12-05
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公开(公告)号: US08598588B2公开(公告)日: 2013-12-03
- 发明人: James S. Im
- 申请人: James S. Im
- 申请人地址: US NY New York
- 专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人地址: US NY New York
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 国际申请: PCT/US2006/046405 WO 20061205
- 国际公布: WO2007/067541 WO 20070614
- 主分类号: H01L29/10
- IPC分类号: H01L29/10
摘要:
In some embodiments, a method of processing a film is provided, the method comprising defining a plurality of spaced-apart regions to be pre-crystallized within the film, the film being disposed on a substrate and capable of laser-induced melting; generating a laser beam having a fluence that is selected to form a mixture of solid and liquid in the film and where a fraction of the film is molten throughout its thickness in an irradiated region; positioning the film relative to the laser beam in preparation for at least partially pre-crystallizing a first region of said plurality of spaced-apart regions; directing the laser beam onto a moving at least partially reflective optical element in the path of the laser beam, the moving optical element redirecting the beam so as to scan a first portion of the first region with the beam in a first direction at a first velocity, wherein the first velocity is selected such that the beam irradiates and forms the mixture of solid and liquid in the first portion of the first region, wherein said first portion of the first region upon cooling forms crystalline grains having predominantly the same crystallographic orientation in at least a single direction; and crystallizing at least the first portion of the first region using laser-induced melting.
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