Invention Grant
- Patent Title: Electrolyte loop with pressure regulation for separated anode chamber of electroplating system
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Application No.: US13051822Application Date: 2011-03-18
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Publication No.: US08603305B2Publication Date: 2013-12-10
- Inventor: Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- Applicant: Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D21/16 ; C25D21/12 ; C25D7/12
Abstract:
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
Public/Granted literature
- US20110226614A1 ELECTROLYTE LOOP WITH PRESSURE REGULATION FOR SEPARATED ANODE CHAMBER OF ELECTROPLATING SYSTEM Public/Granted day:2011-09-22
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