- 专利标题： Electrolyte loop with pressure regulation for separated anode chamber of electroplating system
-
申请号： US13051822申请日： 2011-03-18
-
公开(公告)号： US08603305B2公开(公告)日： 2013-12-10
- 发明人: Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- 申请人： Robert Rash , Richard Abraham , David W. Porter , Steven T. Mayer
- 申请人地址： US CA Fremont
- 专利权人： Novellus Systems, Inc.
- 当前专利权人： Novellus Systems, Inc.
- 当前专利权人地址： US CA Fremont
- 代理机构： Weaver Austin Villeneuve & Sampson LLP
- 主分类号： C25D17/00
- IPC分类号： C25D17/00 ; C25D21/16 ; C25D21/12 ; C25D7/12
摘要：
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.
公开/授权文献
信息查询
