Invention Grant
- Patent Title: Apparatus for optically inspecting an at least partially reflecting surface of an object
- Patent Title (中): 用于光学检查物体的至少部分反射表面的装置
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Application No.: US13171105Application Date: 2011-06-28
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Publication No.: US08605146B2Publication Date: 2013-12-10
- Inventor: Klaus-Georg Knupfer , Joachim Reimann , Volker Huss , Volker Schöllkopf
- Applicant: Klaus-Georg Knupfer , Joachim Reimann , Volker Huss , Volker Schöllkopf
- Applicant Address: DE Wangen
- Assignee: Carl Zeiss OIM GmbH
- Current Assignee: Carl Zeiss OIM GmbH
- Current Assignee Address: DE Wangen
- Agency: Walter Ottesen P.A.
- Priority: DE102008064562 20081229
- Main IPC: H04N7/18
- IPC: H04N7/18

Abstract:
An apparatus for optically inspecting an at least partially reflecting surface of an object includes first and second transverse carriers (12, 14) defining respective substantially circular segment-shaped cutouts (32). The transverse carriers (12, 14) are disposed at a longitudinal distance (D) from one another and the longitudinal distance (D) defines a longitudinal direction (17). A plurality of longitudinal members are configured to hold the first and second transverse carriers at the longitudinal distance (D). The longitudinal members are arranged at a defined radial distance to the circular segment-shaped cutouts. A translucent diffusing screen is held in the circular segment-shaped cutouts by the transverse carriers to form a tunnel-shaped inspection space. A multiplicity of light sources are arranged outside of the tunnel-shaped inspection space behind the diffusing screen. The light sources are configured to be controlled individually or in small groups to generate variable light-dark patterns on the diffusing screen. A workpiece receptacle is configured for accommodating the object in the tunnel-shaped inspection space. At least one camera is directed into the tunnel-shaped inspection space. An evaluation and control unit is configured to control the light sources and the camera to generate various light-dark patterns on the diffusing screen and to record and evaluate a plurality of images of the object in dependence on the light-dark patterns.
Public/Granted literature
- US20110310242A1 APPARATUS FOR OPTICALLY INSPECTING AN AT LEAST PARTIALLY REFLECTING SURFACE OF AN OBJECT Public/Granted day:2011-12-22
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