发明授权
- 专利标题: Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
- 专利标题(中): 具有增强检测水平的振动纳米级或微尺度机电元件
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申请号: US12680687申请日: 2008-10-08
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公开(公告)号: US08607630B2公开(公告)日: 2013-12-17
- 发明人: Fabrice Casset
- 申请人: Fabrice Casset
- 申请人地址: FR Paris FR Montrouge
- 专利权人: Commissariat a l'energie atomique et aux energies alternatives,STMicroelectronics SA
- 当前专利权人: Commissariat a l'energie atomique et aux energies alternatives,STMicroelectronics SA
- 当前专利权人地址: FR Paris FR Montrouge
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR0758173 20071009
- 国际申请: PCT/EP2008/063468 WO 20081008
- 国际公布: WO2009/047266 WO 20090416
- 主分类号: G01C19/00
- IPC分类号: G01C19/00
摘要:
A vibrating nano-scale or micro-scale electromechanical component including a vibrating mechanical element that cooperates with at least one detection electrode. The detection electrode is flexible and is configured to vibrate in phase opposition relative to the vibrating mechanical element. Such a component may find, for example, application to resonators or motion sensors.