Invention Grant
- Patent Title: Combinatorial approach for screening of ALD film stacks
- Patent Title (中): 组合方法用于筛选ALD膜堆叠
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Application No.: US13302730Application Date: 2011-11-22
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Publication No.: US08609519B2Publication Date: 2013-12-17
- Inventor: Albert Lee , Tony P. Chiang , Jason Wright
- Applicant: Albert Lee , Tony P. Chiang , Jason Wright
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/31 ; H01L21/469 ; H01L21/20 ; H01L21/205 ; H01L21/365
Abstract:
In some embodiments of the present invention, methods of using one or more small spot showerhead apparatus to deposit materials using CVD, PECVD, ALD, or PEALD on small spots in a site isolated, combinatorial manner are described. The small spot showerheads may be configured within a larger combinatorial showerhead to allow multi-layer film stacks to be deposited in a combinatorial manner.
Public/Granted literature
- US20130130490A1 COMBINATORIAL APPROACH FOR SCREENING OF ALD FILM STACKS Public/Granted day:2013-05-23
Information query
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