发明授权
- 专利标题： MEMS device with central anchor for stress isolation
- 专利标题（中）： 具有中心锚杆的MEMS器件用于应力隔离
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申请号： US13088579申请日： 2011-04-18
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公开(公告)号： US08610222B2公开(公告)日： 2013-12-17
- 发明人: Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
- 申请人： Yizhen Lin , Gary G. Li , Andrew C. McNeil , Todd F. Miller , Lisa Z. Zhang
- 申请人地址： US TX Austin
- 专利权人： Freescale Semiconductor, Inc.
- 当前专利权人： Freescale Semiconductor, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Schmeiser, Olsen & Watts LLP
- 代理商 Lowell W. Gresham; Charlene R. Jacobsen
- 主分类号： H01L27/14
- IPC分类号： H01L27/14
摘要：
A MEMS device (20) includes a proof mass (32) coupled to and surrounding an immovable structure (30). The immovable structure (30) includes fixed fingers (36, 38) extending outwardly from a body (34) of the structure (30). The proof mass (32) includes movable fingers (60), each of which is disposed between a pair (62) of the fixed fingers (36, 38). A central area (42) of the body (34) is coupled to an underlying substrate (24), with the remainder of the immovable structure (30) and the proof mass (32) being suspended above the substrate (24) to largely isolate the MEMS device (20) from package stress, Additionally, the MEMS device (20) includes isolation trenches (80) and interconnects (46, 50, 64) so that the fixed fingers (36), the fixed fingers (38), and the movable fingers (60) are electrically isolated from one another to yield a differential device configuration.
公开/授权文献
- US20120262026A1 MEMS DEVICE WITH CENTRAL ANCHOR FOR STRESS ISOLATION 公开/授权日：2012-10-18
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