发明授权
- 专利标题： Production flow and reusable testing method
- 专利标题（中）： 生产流程和可重复使用的检测方法
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申请号： US13247071申请日： 2011-09-28
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公开(公告)号： US08614105B2公开(公告)日： 2013-12-24
- 发明人: Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Hao Chen
- 申请人： Mill-Jer Wang , Ching-Nen Peng , Hung-Chih Lin , Hao Chen
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Slater & Matsil, L.L.P.
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
An embodiment is a method. The method comprises providing a substrate comprising a die area. The die area comprises sections of pad patterns, and first sections of the sections each comprise a first uniform pad pattern. The method further comprises probing a first one of the first sections with a first probe card; stepping the first probe card to a second one of the first sections; and probing the second one of the first sections with the first probe card.
公开/授权文献
- US20130078745A1 Production Flow and Reusable Testing Method 公开/授权日：2013-03-28
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