发明授权
US08614137B2 Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture 有权
浅沟槽隔离(STI)中的双接触沟槽电阻和制造方法

Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
摘要:
The invention relates to a semiconductor structures and methods of manufacture and, more particularly, to a dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture. In a first aspect of the invention, a method comprises forming a trench in a substrate; forming a first insulator layer within the trench; forming a first electrode within the trench, on the first insulator layer, and isolated from the substrate by the first insulator layer; forming a second insulator layer within the trench and on the first electrode; and forming a second electrode within the trench, on the second insulator layer, and isolated from the substrate by the first insulator layer and the second insulator layer.
信息查询
0/0