发明授权
US08614137B2 Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
有权
浅沟槽隔离(STI)中的双接触沟槽电阻和制造方法
- 专利标题: Dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture
- 专利标题(中): 浅沟槽隔离(STI)中的双接触沟槽电阻和制造方法
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申请号: US13025501申请日: 2011-02-11
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公开(公告)号: US08614137B2公开(公告)日: 2013-12-24
- 发明人: Timothy W. Kemerer , James S. Nakos , Steven M. Shank
- 申请人: Timothy W. Kemerer , James S. Nakos , Steven M. Shank
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号: H01L21/76
- IPC分类号: H01L21/76 ; H01L29/86
摘要:
The invention relates to a semiconductor structures and methods of manufacture and, more particularly, to a dual contact trench resistor in shallow trench isolation (STI) and methods of manufacture. In a first aspect of the invention, a method comprises forming a trench in a substrate; forming a first insulator layer within the trench; forming a first electrode within the trench, on the first insulator layer, and isolated from the substrate by the first insulator layer; forming a second insulator layer within the trench and on the first electrode; and forming a second electrode within the trench, on the second insulator layer, and isolated from the substrate by the first insulator layer and the second insulator layer.