发明授权
US08614497B2 Method for fabricating a MIM capacitor using gate metal for electrode and related structure
有权
用于电极栅极金属和相关结构的MIM电容器的制造方法
- 专利标题: Method for fabricating a MIM capacitor using gate metal for electrode and related structure
- 专利标题(中): 用于电极栅极金属和相关结构的MIM电容器的制造方法
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申请号: US12462692申请日: 2009-08-07
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公开(公告)号: US08614497B2公开(公告)日: 2013-12-24
- 发明人: Wei Xia , Xiangdong Chen , Akira Ito
- 申请人: Wei Xia , Xiangdong Chen , Akira Ito
- 申请人地址: US CA Irvine
- 专利权人: Broadcom Corporation
- 当前专利权人: Broadcom Corporation
- 当前专利权人地址: US CA Irvine
- 代理机构: Farjami & Farjami LLP
- 主分类号: H01L29/92
- IPC分类号: H01L29/92
摘要:
According to one exemplary embodiment, a method for fabricating a MIM capacitor in a semiconductor die includes forming a dielectric one segment over a substrate and a metal one segment over the dielectric one segment, where the metal one segment forms a lower electrode of the MIM capacitor. The method further includes forming a dielectric two segment over the dielectric one segment and a metal two segment over the dielectric two segment, where a portion of the metal two segment forms an upper electrode of the MIM capacitor. The metal one segment comprises a first gate metal. The metal two segment can comprise a second gate metal.
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