发明授权
US08615126B2 Method for performing pattern decomposition based on feature pitch 失效
基于特征间距进行图案分解的方法

Method for performing pattern decomposition based on feature pitch
摘要:
The present invention discloses a method for decomposing a target pattern containing features to be printed on a wafer, into multiple patterns, the features having a plurality of patterns within a minimum pitch for processes utilized to image the target pattern. The method includes superposing a predefined kernel over a pixel, and moving the kernel from one pixel to another, the pixels representing the sub-patterns of the target pattern. Polarity of the kernel may be reversed when the pixel has a stored intensity value that is negative.
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