发明授权
- 专利标题： Nano-filter and method of forming same, and method of filtration
- 专利标题（中）： 纳米过滤器及其形成方法及过滤方法
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申请号： US12966370申请日： 2010-12-13
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公开(公告)号： US08617412B2公开(公告)日： 2013-12-31
- 发明人: Brent A. Anderson , Andres Bryant , Edward J. Nowak , Jeffrey W. Sleight
- 申请人： Brent A. Anderson , Andres Bryant , Edward J. Nowak , Jeffrey W. Sleight
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Hoffman Warnick LLC
- 代理商 Anthony J. Canale
- 主分类号： C23F3/00
- IPC分类号： C23F3/00 ; B01D29/46 ; H01L21/02
摘要：
The disclosure relates generally to nano-filters and methods of forming same, and methods of filtration. The nano-filter includes a substrate and at least one nanowire structure located between an inlet and an outlet. The nanowire structure may include a plurality of vertically stacked horizontal nanowires.