发明授权
- 专利标题: Bolometer type Terahertz wave detector
- 专利标题(中): 分光光度计型太赫兹波检测器
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申请号: US13151837申请日: 2011-06-02
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公开(公告)号: US08618483B2公开(公告)日: 2013-12-31
- 发明人: Seiji Kurashina , Naoki Oda
- 申请人: Seiji Kurashina , Naoki Oda
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-136499 20100615
- 主分类号: G01J5/00
- IPC分类号: G01J5/00 ; G01J5/20 ; H01L27/14
摘要:
A bolometer type Terahertz wave detector comprises: a temperature detecting portion having a thin bolometer film formed on a substrate, a reflective film that reflects Terahertz waves formed on the substrate at a position facing the temperature detecting portion, and an absorption film formed on the top surface of part of an eave-like member that extends to the inside from the perimeter edge section of the temperature detecting portion and that absorbs Terahertz waves. The reflective film and the absorption film form an optical resonant structure. A thermal isolation structure is formed by a support portion that supports the temperature detecting portion such that it is separated from the substrate by a gap. The eave-like member is supported by the support portion so that it is separated from the substrate by a gap.
公开/授权文献
- US20110303847A1 BOLOMETER TYPE TERAHERTZ WAVE DETECTOR 公开/授权日:2011-12-15
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