Invention Grant
- Patent Title: Flap transfer valve with pivotable valve closure beam
- Patent Title (中): 襟翼转换阀,带有可旋转的阀门关闭梁
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Application No.: US13020248Application Date: 2011-02-03
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Publication No.: US08622368B2Publication Date: 2014-01-07
- Inventor: Friedrich Geiser
- Applicant: Friedrich Geiser
- Applicant Address: CH
- Assignee: VAT Holding AG
- Current Assignee: VAT Holding AG
- Current Assignee Address: CH
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: EP10152682 20100204
- Main IPC: F16K1/16
- IPC: F16K1/16

Abstract:
A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane.
Public/Granted literature
- US20110186762A1 FLAP TRANSFER VALVE WITH PIVOTABLE VALVE CLOSURE BEAM Public/Granted day:2011-08-04
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