发明授权
US08623222B2 MEMS-based micro and nano grippers with two axis force sensors
有权
基于MEMS的微型和纳米夹具具有双轴力传感器
- 专利标题： MEMS-based micro and nano grippers with two axis force sensors
- 专利标题（中）： 基于MEMS的微型和纳米夹具具有双轴力传感器
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申请号： US13652851申请日： 2012-10-16
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公开(公告)号： US08623222B2公开(公告)日： 2014-01-07
- 发明人: Yu Sun , Keekyoung Kim
- 申请人： Yu Sun , Keekyoung Kim
- 代理机构： Miller Thomson LLP
- 代理商 Eugene Gierczak
- 主分类号： C23F1/00
- IPC分类号： C23F1/00
摘要：
The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.
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