发明授权
US08623458B2 Methods of directed self-assembly, and layered structures formed therefrom
有权
定向自组装的方法和由其形成的分层结构
- 专利标题: Methods of directed self-assembly, and layered structures formed therefrom
- 专利标题(中): 定向自组装的方法和由其形成的分层结构
-
申请号: US12642018申请日: 2009-12-18
-
公开(公告)号: US08623458B2公开(公告)日: 2014-01-07
- 发明人: Joy Cheng , Matthew E. Colburn , Stefan Harrer , William D. Hinsberg , Steven J. Holmes , Ho-Cheol Kim , Daniel Paul Sanders
- 申请人: Joy Cheng , Matthew E. Colburn , Stefan Harrer , William D. Hinsberg , Steven J. Holmes , Ho-Cheol Kim , Daniel Paul Sanders
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Michael R. Roberts
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; C08J5/18 ; C08J5/00
摘要:
A layered structure comprising a self-assembled material is formed by a method that includes forming a photochemically, thermally and/or chemically treated patterned photoresist layer disposed on a first surface of a substrate. The treated patterned photoresist layer comprises a non-crosslinked treated photoresist. An orientation control material is cast on the treated patterned photoresist layer, forming a layer containing orientation control material bound to a second surface of the substrate. The treated photoresist and, optionally, any non-bound orientation control material are removed by a development process, resulting in a pre-pattern for self-assembly. A material capable of self-assembly is cast on the pre-pattern. The casted material is allowed to self-assemble with optional heating and/or annealing to produce the layered structure.
公开/授权文献
信息查询