Invention Grant
- Patent Title: Projection objective for microlithography
- Patent Title (中): 微光刻的投影目标
-
Application No.: US12884670Application Date: 2010-09-17
-
Publication No.: US08629972B2Publication Date: 2014-01-14
- Inventor: Johannes Zellner , Hans-Juergen Mann , Martin Endres
- Applicant: Johannes Zellner , Hans-Juergen Mann , Martin Endres
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102008000800 20080320; DE102008033342 20080716
- Main IPC: G02B5/10
- IPC: G02B5/10 ; G03B27/32 ; G03B27/42 ; G03B27/54

Abstract:
A projection objective for microlithography is used for imaging an object field in an object plane into an image field in an image plane. The projection objective comprises at least six mirrors of which at least one mirror has a freeform reflecting surface. The ratio between an overall length (T) of the projection objective and an object image shift (dOIS) can be smaller than 12. The image plane is the first field plane of the projection objective downstream of the object plane. The projection objective can have a plurality of mirrors, wherein the ratio between an overall length (T) and an object image shift (dOIS) is smaller than 2.
Public/Granted literature
- US20110026003A1 PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY Public/Granted day:2011-02-03
Information query