发明授权
- 专利标题: Micromechanical component, optical device, manufacturing method for a micromechanical component, and manufacturing method for an optical device
- 专利标题(中): 微机械部件,光学元件,微机械部件的制造方法以及光学元件的制造方法
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申请号: US13004451申请日: 2011-01-11
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公开(公告)号: US08630050B2公开(公告)日: 2014-01-14
- 发明人: Reinhold Fiess , Ingo Ramsteiner , Ulrich Kallmann
- 申请人: Reinhold Fiess , Ingo Ramsteiner , Ulrich Kallmann
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102010000878 20100114
- 主分类号: G02B27/00
- IPC分类号: G02B27/00
摘要:
A micromechanical component is described having a component which has a moth-eye structure which covers at least a partial surface of the component. At least a portion of the partial surface, as a first contact surface, may contact a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. Alternatively or additionally, at least a portion of the partial surface may be at least one partial area of an outer side and/or of an exposed inner side, facing the inner space, of the component configured as a light window. Also described is an optical device having such a micromechanical component, a manufacturing method for a micromechanical component, and a manufacturing method for an optical device.
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