发明授权
- 专利标题: Resonating sensor with mechanical constraints
- 专利标题(中): 谐振传感器具有机械约束
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申请号: US12940354申请日: 2010-11-05
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公开(公告)号: US08631700B2公开(公告)日: 2014-01-21
- 发明人: Firas N. Sammoura , William D. Sawyer
- 申请人: Firas N. Sammoura , William D. Sawyer
- 申请人地址: US MA Norwood
- 专利权人: Analog Devices, Inc.
- 当前专利权人: Analog Devices, Inc.
- 当前专利权人地址: US MA Norwood
- 代理机构: Sunstein Kann Murphy & Timbers LLP
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
A method and apparatus for sensing movement resonates a primary member in a flexure mode at a given frequency, thus causing the primary member to have top and bottom portions that resonate at substantially about zero Hertz. The method also secures the bottom portion to a first substrate, and mechanically constrains the top portion while resonating in the flexure mode to substantially eliminate vibrations in the top portion. Finally, the method generates a changing capacitance signal in response to movement of the primary member. When generating this changing capacitance signal, the primary member resonates in a bulk mode at a given frequency.
公开/授权文献
- US20120111112A1 Resonating Sensor with Mechanical Constraints 公开/授权日:2012-05-10
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