Invention Grant
- Patent Title: Substrate centering device and organic material deposition system
- Patent Title (中): 基板定心装置和有机材料沉积系统
-
Application No.: US13942514Application Date: 2013-07-15
-
Publication No.: US08632854B2Publication Date: 2014-01-21
- Inventor: Jae-Mork Park , You-Min Cha , Won-Seok Cho , Jae-Hong Ahn , Min-Jeong Hwang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2009-0091322 20090925
- Main IPC: C23C16/458
- IPC: C23C16/458 ; H01L21/306 ; C23F1/00 ; B05D1/32 ; B05D5/00 ; C23C16/06 ; C23C16/22

Abstract:
A substrate centering device for an organic material deposition system comprises: a plurality of substrate support holders configured to be reciprocally movable in a facing direction within an organic material deposition chamber and supporting both side portions of a substrate loaded by a robot; a substrate centering unit configured to be reciprocally movable at each of the substrate support holders and centering the substrate by guiding both side portions of the substrate; and a plurality of substrate clampers configured to be reciprocally movable in a vertical direction at each of the substrate support holders, and clamping the substrate that has been centered by the substrate centering unit.
Public/Granted literature
- US20130302134A1 SUBSTRATE CENTERING DEVICE AND ORGANIC MATERIAL DEPOSITION SYSTEM Public/Granted day:2013-11-14
Information query
IPC分类: