发明授权
- 专利标题: Layered structures on thin substrates
- 专利标题(中): 薄基底上的分层结构
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申请号: US11318975申请日: 2005-12-27
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公开(公告)号: US08637138B2公开(公告)日: 2014-01-28
- 发明人: Michal V. Wolkin , Ana C. Arias
- 申请人: Michal V. Wolkin , Ana C. Arias
- 申请人地址: US CA Palo Alto
- 专利权人: Palo Alto Research Center Incorporated
- 当前专利权人: Palo Alto Research Center Incorporated
- 当前专利权人地址: US CA Palo Alto
- 代理机构: Hollingsworth Davis, PLLC
- 主分类号: B41M5/52
- IPC分类号: B41M5/52 ; G01K17/00 ; G01K7/24
摘要:
A thin substrate has a layered structure on one surface, and can also have a layered structure on the other. Each layered structure can include a part of at least one patterned layer that, if patterned by photolithography, would frequently result in damage to the substrate due to fragility. For example, the substrate could be a 3 mil (76.2 μm) or thinner polyimide film and one patterned layer could be a semiconductor material such as vanadium oxide, while another could be metal in electrical contact with semiconductor material. The layer part, however, can be patterned by a printing operation or can include a printed patterned artifact such as an uneven boundary or an alignment. The printing operation can be direct printing or printing of a mask for etching or liftoff or both. The layered structure can include an array of cells, each with layer parts on each substrate surface.
公开/授权文献
- US20070148416A1 Layered structures on thin substrates 公开/授权日:2007-06-28
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