发明授权
US08637844B2 Method for fabrication of crystalline diodes for resistive memories
有权
制造电阻式存储器晶体二极管的方法
- 专利标题: Method for fabrication of crystalline diodes for resistive memories
- 专利标题(中): 制造电阻式存储器晶体二极管的方法
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申请号: US13097307申请日: 2011-04-29
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公开(公告)号: US08637844B2公开(公告)日: 2014-01-28
- 发明人: Bipin Rajendran , Thomas Happ , Hsiang-Lan Lung , Min Yang
- 申请人: Bipin Rajendran , Thomas Happ , Hsiang-Lan Lung , Min Yang
- 申请人地址: US NY Armonk TW Hsinchu DE Munich
- 专利权人: International Business Machines Corporation,Macronix International Co., Ltd.,Qimonda AG
- 当前专利权人: International Business Machines Corporation,Macronix International Co., Ltd.,Qimonda AG
- 当前专利权人地址: US NY Armonk TW Hsinchu DE Munich
- 代理机构: Scully, Scott, Murphy & Presser. P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
The present invention, in one embodiment, provides a method of producing a PN junction the method including at least the steps of providing a Si-containing substrate; forming an insulating layer on the Si-containing substrate; forming a via through the insulating layer to expose at least a portion of the Si-containing substrate; forming a seed layer of the exposed portion of the Si containing substrate; forming amorphous Si on at least the seed layer; converting at least a portion of the amorphous Si to provide crystalline Si; and forming a first dopant region abutting a second dopant region in the crystalline Si.
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