Invention Grant
- Patent Title: Method and apparatus for imaging three-dimensional structure
- Patent Title (中): 三维结构成像方法及装置
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Application No.: US13784511Application Date: 2013-03-04
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Publication No.: US08638448B2Publication Date: 2014-01-28
- Inventor: Noam Babayoff , Isaia Glaser-Inbari
- Applicant: Cadent Ltd.
- Applicant Address: IL Or Yehuda
- Assignee: Cadent Ltd.
- Current Assignee: Cadent Ltd.
- Current Assignee Address: IL Or Yehuda
- Agency: Wilson Sonsini Goodrich & Rosati
- Priority: IL125659 19980805
- Main IPC: G01B11/24
- IPC: G01B11/24
Abstract:
An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.
Public/Granted literature
- US20130177866A1 METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE Public/Granted day:2013-07-11
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