发明授权
- 专利标题: System and method for depositing a material on a substrate
- 专利标题(中): 用于在基材上沉积材料的系统和方法
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申请号: US13616170申请日: 2012-09-14
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公开(公告)号: US08642125B2公开(公告)日: 2014-02-04
- 发明人: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- 申请人: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- 申请人地址: US OH Perrysburg
- 专利权人: First Solar, Inc
- 当前专利权人: First Solar, Inc
- 当前专利权人地址: US OH Perrysburg
- 代理机构: Dickstein Shapiro LLP
- 主分类号: C23C16/448
- IPC分类号: C23C16/448 ; C23C16/455
摘要:
A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.
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