发明授权
- 专利标题: Semiconductor device and production method therefor
- 专利标题(中): 半导体装置及其制造方法
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申请号: US13534615申请日: 2012-06-27
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公开(公告)号: US08642426B2公开(公告)日: 2014-02-04
- 发明人: Fujio Masuoka , Hiroki Nakamura
- 申请人: Fujio Masuoka , Hiroki Nakamura
- 申请人地址: SG Peninsula Plaza
- 专利权人: Unisantis Electronics Singapore Pte Ltd.
- 当前专利权人: Unisantis Electronics Singapore Pte Ltd.
- 当前专利权人地址: SG Peninsula Plaza
- 代理机构: Brinks Gilson & Lione
- 优先权: JP2009-073973 20090325
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8238 ; H01L21/8249 ; H01L21/31 ; H01L21/469
摘要:
It is an object to allow an inverter to be made up using a single island-shaped semiconductor, so as to provide a semiconductor device comprising a highly-integrated SGT-based CMOS inverter circuit. The object is achieved by a semiconductor device which comprises an island-shaped semiconductor layer, a first gate dielectric film surrounding a periphery of the island-shaped semiconductor layer, a gate electrode surrounding a periphery of the first gate dielectric film, a second gate dielectric film surrounding a periphery of the gate electrode, a tubular semiconductor layer surrounding a periphery of the second gate dielectric film, a first first-conductive-type high-concentration semiconductor layer disposed on top of the island-shaped semiconductor layer, a second first-conductive-type high-concentration semiconductor layer disposed underneath the island-shaped semiconductor layer, a first second-conductive-type high-concentration semiconductor layer disposed on top of the tubular semiconductor layer, and a second second-conductive-type high-concentration semiconductor layer disposed underneath the tubular semiconductor layer.
公开/授权文献
- US20120264265A1 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR 公开/授权日:2012-10-18
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