发明授权
US08643147B2 Seal ring structure with improved cracking protection and reduced problems 有权
密封环结构具有改进的开裂保护和减少的问题

Seal ring structure with improved cracking protection and reduced problems
摘要:
An integrated circuit structure includes a lower dielectric layer; an upper dielectric layer over the lower dielectric layer; and a seal ring. The seal ring includes an upper metal line in the upper dielectric layer; a continuous via bar underlying and abutting the upper metal line, wherein the continuous via bar has a width greater than about 70 percent of a width of the upper metal line; a lower metal line in the lower dielectric layer; and a via bar underlying and abutting the lower metal line. The via bar has a width substantially less than a half of a width of the lower metal line.
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