发明授权
- 专利标题: Microfabricated microphone
- 专利标题(中): 微型麦克风
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申请号: US12527147申请日: 2008-02-19
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公开(公告)号: US08644528B2公开(公告)日: 2014-02-04
- 发明人: Mehran Mehregany
- 申请人: Mehran Mehregany
- 申请人地址: US OH Cleveland
- 专利权人: Case Western Reserve University
- 当前专利权人: Case Western Reserve University
- 当前专利权人地址: US OH Cleveland
- 代理机构: Tarolli, Sundheim, Covell & Tummino LLP
- 国际申请: PCT/US2008/054302 WO 20080219
- 国际公布: WO2008/103672 WO 20080828
- 主分类号: H04R25/00
- IPC分类号: H04R25/00
摘要:
The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.
公开/授权文献
- US20100254560A1 MICROFABRICATED MICROPHONE 公开/授权日:2010-10-07