发明授权
- 专利标题: Status polling
- 专利标题(中): 状态轮询
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申请号: US11622720申请日: 2007-01-12
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公开(公告)号: US08645100B2公开(公告)日: 2014-02-04
- 发明人: Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
- 申请人: Krishnamurthy Bhaskar , Mark J. Roulo , John S. Taylor , Lawrence R. Miller , Paul T. Russell , Jason Z. Lin , Eliezer Rosengaus , Richard M. Wallingford , Kishore Bubna
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Luedeka Neely Group, P.C.
- 代理商 Rick Barnes
- 主分类号: G06F11/30
- IPC分类号: G06F11/30
摘要:
An inspection system for detecting anomalies on a substrate. The inspection system has a sensor array for generating image data. A first high speed network is coupled to the sensor array and receives and communicates the image data. An array of process nodes is coupled to the first high speed network, and receives and processes the image data to produce anomaly reports. Each process node has an interface card coupled to the first high speed network, that receives the image data from the first high speed network and formats the image data according to a high speed interface bus protocol. The interface card sets a register indicating whether a predetermined amount of image data has been stored in a memory, and the process node reads the register to determine whether the predetermined amount of image data has been stored in the memory, and initiates image processing when the register indicates that the predetermined amount of image data has been stored in the memory.
公开/授权文献
- US20070124095A1 Status Polling 公开/授权日:2007-05-31
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