Invention Grant
US08649080B2 Two-dimensional optical deflector including only one pair of meander-type piezoelectric actuators and its driver 有权
二维光学偏转器仅包括一对曲折型压电致动器及其驱动器

Two-dimensional optical deflector including only one pair of meander-type piezoelectric actuators and its driver
Abstract:
In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.
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