Invention Grant
US08652876B2 Method of manufacturing pram using laser interference lithography 有权
使用激光干涉光刻制造婴儿车的方法

Method of manufacturing pram using laser interference lithography
Abstract:
A method of manufacturing a phase-change random access memory includes: sequentially depositing an insulating layer, a first electrode layer, a phase change material layer, and a transfer material layer on a substrate; forming an array pattern in the transfer material layer using a laser interference lithography process; forming a metal layer on the transfer material layer having the array pattern formed; forming a second electrode layer by removing the transfer material layer; and forming a phase change layer by etching the phase change material layer using the second electrode layer as a mask. Accordingly, the manufacturing process of the phase-change random access memory may achieve an increase in speed and may be simplified.
Public/Granted literature
Information query
Patent Agency Ranking
0/0