Invention Grant
- Patent Title: Method of manufacturing pram using laser interference lithography
- Patent Title (中): 使用激光干涉光刻制造婴儿车的方法
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Application No.: US13672943Application Date: 2012-11-09
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Publication No.: US08652876B2Publication Date: 2014-02-18
- Inventor: Young Hwan Kim , Yong Tae Kim , Jinn Il Choi
- Applicant: Korea Institute of Science and Technology
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2012-0021214 20120229
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A method of manufacturing a phase-change random access memory includes: sequentially depositing an insulating layer, a first electrode layer, a phase change material layer, and a transfer material layer on a substrate; forming an array pattern in the transfer material layer using a laser interference lithography process; forming a metal layer on the transfer material layer having the array pattern formed; forming a second electrode layer by removing the transfer material layer; and forming a phase change layer by etching the phase change material layer using the second electrode layer as a mask. Accordingly, the manufacturing process of the phase-change random access memory may achieve an increase in speed and may be simplified.
Public/Granted literature
- US20130224908A1 METHOD OF MANUFACTURING PRAM USING LASER INTERFERENCE LITHOGRAPHY Public/Granted day:2013-08-29
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