Invention Grant
- Patent Title: Tunable semiconductor device
- Patent Title (中): 可调谐半导体器件
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Application No.: US13740673Application Date: 2013-01-14
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Publication No.: US08652919B2Publication Date: 2014-02-18
- Inventor: David L. Harame , Alvin J. Joseph , Qizhi Liu , Ramana M. Malladi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jason Sosa
- Main IPC: H01L21/331
- IPC: H01L21/331

Abstract:
Embodiments of the present invention include a method for forming a tunable semiconductor device. In one embodiment, the method comprises: forming a semiconductor substrate; patterning a first mask over the semiconductor substrate; doping regions of the semiconductor substrate not protected by the first mask to form a first discontinuous subcollector; removing the first mask; patterning a second mask over the semiconductor substrate; doping regions of the semiconductor substrate not protected by the second mask and on top of the first discontinuous subcollector to form a second discontinuous subcollector; removing the second mask; and forming a single continuous collector above the second discontinuous subcollector.
Public/Granted literature
- US20130130462A1 TUNABLE SEMICONDUCTOR DEVICE Public/Granted day:2013-05-23
Information query
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