Invention Grant
- Patent Title: Integrated circuit including DRAM and SRAM/logic
- Patent Title (中): 集成电路包括DRAM和SRAM /逻辑
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Application No.: US13344885Application Date: 2012-01-06
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Publication No.: US08653596B2Publication Date: 2014-02-18
- Inventor: Kangguo Cheng , Bruce B. Doris , Terence B. Hook , Ali Khakifirooz , Pranita Kulkarni
- Applicant: Kangguo Cheng , Bruce B. Doris , Terence B. Hook , Ali Khakifirooz , Pranita Kulkarni
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/12 ; H01L21/762 ; H01L21/84

Abstract:
An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.
Public/Granted literature
- US20130175595A1 INTEGRATED CIRCUIT INCLUDING DRAM AND SRAM/LOGIC Public/Granted day:2013-07-11
Information query
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