Invention Grant
- Patent Title: Optical component for maskless exposure apparatus
- Patent Title (中): 无掩模曝光装置的光学部件
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Application No.: US13826337Application Date: 2013-03-14
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Publication No.: US08654312B2Publication Date: 2014-02-18
- Inventor: Jin Ho Jung
- Applicant: Jin Ho Jung
- Agency: Sherr & Jiang, PLLC
- Priority: KR10-2008-0046474 20080520; KR10-2008-0121948 20081203
- Main IPC: G02B5/04
- IPC: G02B5/04 ; G03B27/42 ; G03B27/54

Abstract:
Disclosed relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of a pixel of a digital micro-mirror display (DMD) formed by a first image-forming lens in the maskless exposure apparatus has no influence on the image of a neighboring pixel and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures (NAs) at the same time.
Public/Granted literature
- US20130194561A1 OPTICAL COMPONENT FOR MASKLESS EXPOSURE APPARATUS Public/Granted day:2013-08-01
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