Invention Grant
US08654312B2 Optical component for maskless exposure apparatus 有权
无掩模曝光装置的光学部件

  • Patent Title: Optical component for maskless exposure apparatus
  • Patent Title (中): 无掩模曝光装置的光学部件
  • Application No.: US13826337
    Application Date: 2013-03-14
  • Publication No.: US08654312B2
    Publication Date: 2014-02-18
  • Inventor: Jin Ho Jung
  • Applicant: Jin Ho Jung
  • Agency: Sherr & Jiang, PLLC
  • Priority: KR10-2008-0046474 20080520; KR10-2008-0121948 20081203
  • Main IPC: G02B5/04
  • IPC: G02B5/04 G03B27/42 G03B27/54
Optical component for maskless exposure apparatus
Abstract:
Disclosed relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of a pixel of a digital micro-mirror display (DMD) formed by a first image-forming lens in the maskless exposure apparatus has no influence on the image of a neighboring pixel and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures (NAs) at the same time.
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