发明授权
US08654438B2 Master oscillator-power amplifier drive laser with pre-pulse for EUV light source
有权
主振荡器 - 功率放大器驱动具有用于EUV光源的预脉冲的激光器
- 专利标题： Master oscillator-power amplifier drive laser with pre-pulse for EUV light source
- 专利标题（中）： 主振荡器 - 功率放大器驱动具有用于EUV光源的预脉冲的激光器
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申请号： US13077236申请日： 2011-03-31
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公开(公告)号： US08654438B2公开(公告)日： 2014-02-18
- 发明人: Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
- 申请人： Kai-Chung Hou , Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Igor V. Fomenkov
- 申请人地址： US CA San Diego
- 专利权人： Cymer, LLC
- 当前专利权人： Cymer, LLC
- 当前专利权人地址： US CA San Diego
- 代理机构： Cymer, LLC
- 主分类号： H01S3/03
- IPC分类号： H01S3/03
摘要：
A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ1 and λ2, with λ1≠λ2; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ1; a main pulse seed laser generating a laser output having wavelength, λ2; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.
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