Invention Grant
- Patent Title: Method of manufacturing stacked wafer level package
- Patent Title (中): 堆叠晶圆级封装的制造方法
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Application No.: US12929703Application Date: 2011-02-09
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Publication No.: US08658467B2Publication Date: 2014-02-25
- Inventor: Seung Wook Park , Young Do Kweon , Jin Gu Kim , Ju Pyo Hong , Hee Kon Lee , Hyung Jin Jeon , Yuan Jing Li , Jong Yun Lee
- Applicant: Seung Wook Park , Young Do Kweon , Jin Gu Kim , Ju Pyo Hong , Hee Kon Lee , Hyung Jin Jeon , Yuan Jing Li , Jong Yun Lee
- Applicant Address: KR Suwon
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon
- Priority: KR10-2008-0112534 20081113; KR10-2008-0127091 20081215
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing a stacked wafer level package includes: preparing a substrate; forming a conductive layer on the substrate; forming chip connection pads and internal connection pads on the conductive layer; forming solder balls connected to the internal connection pads; mounting a semiconductor chip on the conductive layer to be connected to the chip connection pads; forming a sealing member to seal the solder balls and the semiconductor chip; separating the substrate from the conductive layer; forming a rearrangement wiring layer by etching the conductive layer; forming an external connection on the rearrangement wiring layer; forming contact holes in the sealing member to expose the solder balls; and stacking an electronic component to be electrically connected to the solder balls exposed through the contact holes.
Public/Granted literature
- US20110129960A1 Method of manufacturing stacked wafer level package Public/Granted day:2011-06-02
Information query
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