发明授权
- 专利标题: Semiconductor storage device
- 专利标题(中): 半导体存储设备
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申请号: US13457889申请日: 2012-04-27
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公开(公告)号: US08658998B2公开(公告)日: 2014-02-25
- 发明人: Hiroyuki Minemura , Yumiko Anzai
- 申请人: Hiroyuki Minemura , Yumiko Anzai
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2011-101129 20110428
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
An intermediate layer including at least one of elements constituting a phase change material and silicon is arranged between a recording layer composed of the phase change material and an n+ polysilicon film to reduce contact resistance between the recording layer and the n+ polysilicon film, thereby simplifying the structure of a phase change memory and reducing the cost thereof. If the phase change material contains Ge, Sb, and Te, for example, the intermediate layer includes at least one of Si—Sb, Si—Te, and Si—Ge.
公开/授权文献
- US20120273742A1 SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2012-11-01
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