发明授权
US08658998B2 Semiconductor storage device 有权
半导体存储设备

Semiconductor storage device
摘要:
An intermediate layer including at least one of elements constituting a phase change material and silicon is arranged between a recording layer composed of the phase change material and an n+ polysilicon film to reduce contact resistance between the recording layer and the n+ polysilicon film, thereby simplifying the structure of a phase change memory and reducing the cost thereof. If the phase change material contains Ge, Sb, and Te, for example, the intermediate layer includes at least one of Si—Sb, Si—Te, and Si—Ge.
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