发明授权
- 专利标题: Variable pitch array spotter
- 专利标题(中): 可变螺距排列器
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申请号: US12385755申请日: 2009-04-17
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公开(公告)号: US08663577B2公开(公告)日: 2014-03-04
- 发明人: Hiroshi Aoki , Masaki Torimura , Hiroaki Tao , Takashi Ikeda
- 申请人: Hiroshi Aoki , Masaki Torimura , Hiroaki Tao , Takashi Ikeda
- 申请人地址: JP Tokyo
- 专利权人: National Institute of Advanced Industrial Science and Technology
- 当前专利权人: National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2006-192000 20060712; JP2007-061165 20070312
- 主分类号: B01L3/00
- IPC分类号: B01L3/00
摘要:
A spotter that includes a plurality of spotting heads, each of the plurality of spotting heads having a discharging portion at a tip portion, the plurality of spotting heads form an m×n array (m, n>1) with m spotting heads arranged lengthwise and n spotting heads arranged crosswise; and a pitch varying mechanism configured to vary an array pitch of the plurality of spotting heads arrayed in a lengthwise direction and an array pitch of the plurality of spotting heads arrayed in a crosswise direction.
公开/授权文献
- US20090233816A1 Variable pitch array spotter 公开/授权日:2009-09-17
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