发明授权
- 专利标题: Methods and apparatus for alignment in flip chip bonding
- 专利标题(中): 倒装芯片接合中对准的方法和装置
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申请号: US13276162申请日: 2011-10-18
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公开(公告)号: US08664039B2公开(公告)日: 2014-03-04
- 发明人: Ming-Chung Sung , Yu-Chih Liu , Wei-Ting Lin , Chien-Hsiun Lee
- 申请人: Ming-Chung Sung , Yu-Chih Liu , Wei-Ting Lin , Chien-Hsiun Lee
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L21/50
- IPC分类号: H01L21/50
摘要:
Methods and apparatus for alignment in a flip chip bonding. A method includes attaching an integrated circuit having connector terminals to a bonding arm, the bonding arm having a chuck for attaching the integrated circuit at the backside surface, the bonding arm having a plurality of CCD imagers mounted thereon; receiving a substrate having pads corresponding to the connector terminals; using the bonding arm, positioning the integrated circuit proximal to the substrate; aligning the integrated circuit connector terminals with the pads on the substrate using the CCD imagers on the bonding arm; positioning the connector terminals in contact with the pads on the substrate; and performing a solder reflow to attach the integrated circuit to the substrate. An apparatus includes a bonding arm with a chuck for carrying a component and CCD imagers mounted on the arm for alignment.
公开/授权文献
- US20130095607A1 Methods and Apparatus For Alignment In Flip Chip Bonding 公开/授权日:2013-04-18
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